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dc.contributor.authorZhu, Y
dc.contributor.authorMoheimani, SOR
dc.contributor.authorYuce, MR
dc.date.accessioned2018-01-23T01:01:22Z
dc.date.available2018-01-23T01:01:22Z
dc.date.issued2011
dc.date.modified2012-06-27T22:41:45Z
dc.identifier.issn0741-3106
dc.identifier.doi10.1109/LED.2011.2155027
dc.identifier.urihttp://hdl.handle.net/10072/42668
dc.description.abstractThis letter reports a micromachined nanopositioner with capacitive actuation together with capacitive and electrothermal sensing on a single chip. With the actuation voltage of 60 V, the electrostatic actuator can achieve a maximum displacement of 2.32 μm. The displacement can be simultaneously measured using capacitive and electrothermal sensors. Both sensors are calibrated to operate at a sensitivity of 0.0137 V/V. The electrothermal sensor is found to display 1/f noise, which affects the low-frequency measurements obtained from this device. However, at higher frequencies, it displays a lower noise power spectral density when compared with the capacitive sensor. The comparisons of frequency responses, power consumptions, and noise performances are presented in this letter.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent480508 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherIEEE
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1146
dc.relation.ispartofpageto1148
dc.relation.ispartofissue8
dc.relation.ispartofjournalIEEE Electron Device Letters
dc.relation.ispartofvolume32
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectronics and Integrated Circuits
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchcode090604
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0906
dc.titleSimultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.rights.copyright© 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.date.issued2011
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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