dc.contributor.author | Zhu, Y | |
dc.contributor.author | Moheimani, SOR | |
dc.contributor.author | Yuce, MR | |
dc.date.accessioned | 2018-01-23T01:01:22Z | |
dc.date.available | 2018-01-23T01:01:22Z | |
dc.date.issued | 2011 | |
dc.date.modified | 2012-06-27T22:41:45Z | |
dc.identifier.issn | 0741-3106 | |
dc.identifier.doi | 10.1109/LED.2011.2155027 | |
dc.identifier.uri | http://hdl.handle.net/10072/42668 | |
dc.description.abstract | This letter reports a micromachined nanopositioner with capacitive actuation together with capacitive and electrothermal sensing on a single chip. With the actuation voltage of 60 V, the electrostatic actuator can achieve a maximum displacement of 2.32 μm. The displacement can be simultaneously measured using capacitive and electrothermal sensors. Both sensors are calibrated to operate at a sensitivity of 0.0137 V/V. The electrothermal sensor is found to display 1/f noise, which affects the low-frequency measurements obtained from this device. However, at higher frequencies, it displays a lower noise power spectral density when compared with the capacitive sensor. The comparisons of frequency responses, power consumptions, and noise performances are presented in this letter. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.format.extent | 480508 bytes | |
dc.format.mimetype | application/pdf | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | IEEE | |
dc.publisher.place | United States | |
dc.relation.ispartofstudentpublication | N | |
dc.relation.ispartofpagefrom | 1146 | |
dc.relation.ispartofpageto | 1148 | |
dc.relation.ispartofissue | 8 | |
dc.relation.ispartofjournal | IEEE Electron Device Letters | |
dc.relation.ispartofvolume | 32 | |
dc.rights.retention | Y | |
dc.subject.fieldofresearch | Microelectronics | |
dc.subject.fieldofresearch | Microelectromechanical systems (MEMS) | |
dc.subject.fieldofresearchcode | 400908 | |
dc.subject.fieldofresearchcode | 401705 | |
dc.title | Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
gro.faculty | Griffith Sciences, Griffith School of Engineering | |
gro.rights.copyright | © 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |
gro.date.issued | 2011 | |
gro.hasfulltext | Full Text | |
gro.griffith.author | Zhu, Yong | |