Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions
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Spin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.
Synthesis of Materials