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dc.contributor.authorA. Martens, Johanen_US
dc.contributor.authorE.A. Kirschhock, Christineen_US
dc.contributor.authorEslava, Salvadoren_US
dc.contributor.authorIacopi, Francescaen_US
dc.contributor.authorMaex, Karenen_US
dc.contributor.authorR.Baklanov, Mikhailen_US
dc.contributor.authorV.Neimark, Alexanderen_US
dc.date.accessioned2017-04-04T21:49:23Z
dc.date.available2017-04-04T21:49:23Z
dc.date.issued2008en_US
dc.date.modified2012-03-20T23:02:38Z
dc.identifier.issn15214095en_US
dc.identifier.doi10.1002/adma.200701798en_US
dc.identifier.urihttp://hdl.handle.net/10072/43710
dc.description.abstractSpin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_US
dc.languageEnglishen_US
dc.publisherWiley - V C H Verlag GmbH & Co. KGaAen_US
dc.publisher.placeGermanyen_US
dc.relation.ispartofstudentpublicationNen_US
dc.relation.ispartofpagefrom3110en_US
dc.relation.ispartofpageto3116en_US
dc.relation.ispartofissue16en_US
dc.relation.ispartofjournalAdvanced Materialsen_US
dc.relation.ispartofvolume20en_US
dc.rights.retentionNen_US
dc.subject.fieldofresearchSynthesis of Materialsen_US
dc.subject.fieldofresearchcode030306en_US
dc.titleEvidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensionsen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.date.issued2008
gro.hasfulltextNo Full Text


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