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dc.contributor.authorEslava, Salvador
dc.contributor.authorBaklanov, Mikhail R.
dc.contributor.authorNeimark, Alexander V.
dc.contributor.authorIacopi, Francesca
dc.contributor.authorKirschhock, Christine E. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorMartens, Johan A.
dc.date.accessioned2017-05-03T15:30:42Z
dc.date.available2017-05-03T15:30:42Z
dc.date.issued2008
dc.date.modified2012-03-20T23:02:38Z
dc.identifier.issn15214095
dc.identifier.doi10.1002/adma.200701798
dc.identifier.urihttp://hdl.handle.net/10072/43710
dc.description.abstractSpin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherWiley - V C H Verlag GmbH & Co. KGaA
dc.publisher.placeGermany
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom3110
dc.relation.ispartofpageto3116
dc.relation.ispartofissue16
dc.relation.ispartofjournalAdvanced Materials
dc.relation.ispartofvolume20
dc.rights.retentionN
dc.subject.fieldofresearchSynthesis of Materials
dc.subject.fieldofresearchPhysical Sciences
dc.subject.fieldofresearchChemical Sciences
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchcode030306
dc.subject.fieldofresearchcode02
dc.subject.fieldofresearchcode03
dc.subject.fieldofresearchcode09
dc.titleEvidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2008
gro.hasfulltextNo Full Text
gro.griffith.authorIacopi, Francesca


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