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dc.contributor.authorEslava, Salvadoren_US
dc.contributor.authorE.A. Kirschhock, Christineen_US
dc.contributor.authorAldea, Stelianaen_US
dc.contributor.authorR.Baklanov, Mikhailen_US
dc.contributor.authorIacopi, Francescaen_US
dc.contributor.authorMaex, Karenen_US
dc.contributor.authorA. Martens, Johanen_US
dc.date.accessioned2017-05-03T15:30:47Z
dc.date.available2017-05-03T15:30:47Z
dc.date.issued2009en_US
dc.date.modified2012-03-21T23:11:33Z
dc.identifier.issn13871811en_US
dc.identifier.doi10.1016/j.micromeso.2008.09.027en_US
dc.identifier.urihttp://hdl.handle.net/10072/43765
dc.description.abstractSpin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ~2-4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_US
dc.languageEnglishen_US
dc.publisherElsevier BVen_US
dc.publisher.placeNetherlandsen_US
dc.relation.ispartofstudentpublicationNen_US
dc.relation.ispartofpagefrom458en_US
dc.relation.ispartofpageto466en_US
dc.relation.ispartofissue1-3en_US
dc.relation.ispartofjournalMicroporous and Mesoporous Materialsen_US
dc.relation.ispartofvolume118en_US
dc.rights.retentionNen_US
dc.subject.fieldofresearchSynthesis of Materialsen_US
dc.subject.fieldofresearchcode030306en_US
dc.titleCharacterization of spin-on zeolite films prepared from Silicalite-1nanoparticle suspensionsen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.date.issued2009
gro.hasfulltextNo Full Text


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