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dc.contributor.authorEslava, Salvadoren_US
dc.contributor.authorUrrutia, Joneen_US
dc.contributor.authorN.Busawon, Abheeshen_US
dc.contributor.authorR.Baklanov, Mikhailen_US
dc.contributor.authorIacopi, Francescaen_US
dc.contributor.authorAldea, Stelianaen_US
dc.contributor.authorMaex, Karenen_US
dc.contributor.authorA. Martens, Johanen_US
dc.contributor.authorE.A. Kirschhock, Christineen_US
dc.description.abstractSpin-on zeolite films deposited from Silicalite-1 nanocrystal suspensions prepared by hydrothermal treatment of clear solutions have the required properties for insulating media in microelectronics. However, on the scale of the feature sizes in on-chip interconnects of a few tens of nanometers, their homogeneity is still insufficient. We discovered a way to overcome this problem by combining the advantages of the clear solution approach of Silicalite-1 synthesis with a sol-gel approach. A combination of tetraethyl orthosilicate and methyltrimethoxysilane silica sources was hydrolyzed and cocondensed in the presence of an aqueous tetraalkylammonium hydroxide template. The resulting suspension of nanoparticles of a few nanometers in size together with residual oligomeric silica species were spun onto support. The final zeolite-inspired low-k films (ZLK) with respect to pore size and homogeneity satisfied all requirements and presented excellent hydrophobicity, stiffness, and dielectric constant. The size and content of initially formed nanoparticles and the spatial hindrance promoted by occluded tetraalkylammonium molecules were found to be crucial elements in the definition of the final pore network.en_US
dc.publisherAmerican Chemical Societyen_US
dc.publisher.placeUnited Statesen_US
dc.relation.ispartofjournalJournal of the American Chemical Societyen_US
dc.subject.fieldofresearchSynthesis of Materialsen_US
dc.titleZeolite-inspired low-k dielectrics overcoming limitations of zeolite filmsen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.rights.copyrightSelf-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the author[s] for more information.en_US
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