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  • Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator

    Author(s)
    Amaya, Satoshi
    Dao, Dzung Viet
    Sugiyama, Susumu
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2011
    Metadata
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    Abstract
    This paper presents a novel fabrication process for monolithic PMMA (polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface-activated direct bonding and elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding microstructures, such as a rotation mirror device integrated with vertical comb actuators. The fabrication process consists of silicon mold fabrication by deep-RIE, PMMA microstructure formation by hot embossing, PMMA-PMMA direct bonding by surface activation, releasing or removal of a PMMA layer ...
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    This paper presents a novel fabrication process for monolithic PMMA (polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface-activated direct bonding and elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding microstructures, such as a rotation mirror device integrated with vertical comb actuators. The fabrication process consists of silicon mold fabrication by deep-RIE, PMMA microstructure formation by hot embossing, PMMA-PMMA direct bonding by surface activation, releasing or removal of a PMMA layer remaining after hot embossing by elliptical vibration cutting, and finally, metallization by sputtering to form electrodes. An efficient technique to protect the PMMA microstructures during the release process using reinforcement material is applied. A monolithic PMMA torsion mirror driven by a vertical comb actuator has been fabricated successfully.
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    Journal Title
    Journal of Micromechanics and Microengineering
    Volume
    21
    Issue
    6
    DOI
    https://doi.org/10.1088/0960-1317/21/6/065032
    Subject
    Engineering
    Engineering practice and education not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/44369
    Collection
    • Journal articles

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