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dc.contributor.authorAmaya, Satoshien_US
dc.contributor.authorDao, Dzung Vieten_US
dc.contributor.authorSugiyama, Susumuen_US
dc.date.accessioned2017-04-24T13:48:31Z
dc.date.available2017-04-24T13:48:31Z
dc.date.issued2011en_US
dc.date.modified2012-04-10T22:47:34Z
dc.identifier.issn09601317en_US
dc.identifier.doi10.1088/0960-1317/21/6/065032en_US
dc.identifier.urihttp://hdl.handle.net/10072/44369
dc.description.abstractThis paper presents a novel fabrication process for monolithic PMMA (polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface-activated direct bonding and elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding microstructures, such as a rotation mirror device integrated with vertical comb actuators. The fabrication process consists of silicon mold fabrication by deep-RIE, PMMA microstructure formation by hot embossing, PMMA-PMMA direct bonding by surface activation, releasing or removal of a PMMA layer remaining after hot embossing by elliptical vibration cutting, and finally, metallization by sputtering to form electrodes. An efficient technique to protect the PMMA microstructures during the release process using reinforcement material is applied. A monolithic PMMA torsion mirror driven by a vertical comb actuator has been fabricated successfully.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_US
dc.languageEnglishen_US
dc.publisherInstitute of Physics Publishing Ltd.en_US
dc.publisher.placeUnited Kingdomen_US
dc.relation.ispartofstudentpublicationNen_US
dc.relation.ispartofpagefrom065032-1en_US
dc.relation.ispartofpageto065032-7en_US
dc.relation.ispartofissue6en_US
dc.relation.ispartofjournalJournal of Micromechanics and Microengineeringen_US
dc.relation.ispartofvolume21en_US
dc.rights.retentionNen_US
dc.subject.fieldofresearchInterdisciplinary Engineering not elsewhere classifieden_US
dc.subject.fieldofresearchcode091599en_US
dc.titleNovel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuatoren_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.date.issued2011
gro.hasfulltextNo Full Text


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