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  • Characterisation of the growth of a carbonaceous film on silicon

    Author(s)
    Beardmore, JP
    Palmer, AJ
    Fabrie, CGCHM
    van Leeuwen, KAH
    Sang, RT
    Griffith University Author(s)
    Sang, Robert T.
    Palmer, Adam J.
    Beardmore, Josh
    Fabrie, Corine GC.
    Year published
    2012
    Metadata
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    Abstract
    In this paperwe present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple ...
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    In this paperwe present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems.
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    Journal Title
    Thin Solid Films
    Volume
    520
    Issue
    7
    DOI
    https://doi.org/10.1016/j.tsf.2011.09.073
    Subject
    Atomic and Molecular Physics
    Physical Sciences
    Engineering
    Technology
    Publication URI
    http://hdl.handle.net/10072/45872
    Collection
    • Journal articles

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