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dc.contributor.authorBeardmore, Joshen_US
dc.contributor.authorPalmer, Adamen_US
dc.contributor.authorFabrie, Corineen_US
dc.contributor.authorvan Leeuwen, K.en_US
dc.contributor.authorSang, Roberten_US
dc.contributor.editorJ. E. Greeneen_US
dc.date.accessioned2017-04-24T08:29:06Z
dc.date.available2017-04-24T08:29:06Z
dc.date.issued2012en_US
dc.date.modified2012-07-13T05:21:34Z
dc.identifier.issn00406090en_US
dc.identifier.doi10.1016/j.tsf.2011.09.073en_US
dc.identifier.urihttp://hdl.handle.net/10072/45872
dc.description.abstractIn this paperwe present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_US
dc.languageEnglishen_US
dc.publisherElsevieren_US
dc.publisher.placeSwitzerlanden_US
dc.relation.ispartofstudentpublicationYen_US
dc.relation.ispartofpagefrom2414en_US
dc.relation.ispartofpageto2417en_US
dc.relation.ispartofissue7en_US
dc.relation.ispartofjournalThin Solid Filmsen_US
dc.relation.ispartofvolume520en_US
dc.rights.retentionYen_US
dc.subject.fieldofresearchAtomic and Molecular Physicsen_US
dc.subject.fieldofresearchcode020201en_US
dc.titleCharacterisation of the growth of a carbonaceous film on siliconen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.date.issued2012
gro.hasfulltextNo Full Text


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