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  • A Micromachined 2DOF Nanopositioner with Integrated Capacitive Displacement Sensor

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    68729_1.pdf (1.450Mb)
    Author(s)
    Ji, Lujun
    Zhu, Yong
    Moheimani, SO Reza
    Yuce, Mehmet Rasit
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2010
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    Abstract
    This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.
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    Conference Title
    2010 IEEE SENSORS
    Publisher URI
    https://ieeexplore.ieee.org/document/5690373
    DOI
    https://doi.org/10.1109/ICSENS.2010.5690373
    Copyright Statement
    © 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subject
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/46527
    Collection
    • Conference outputs

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