A Micromachined 2-DOF Electrostatic Stage with Integrated Capacitive Position Sensor
This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.
Proceedings of the 9th IEEE Conf. Sensors
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Microelectromechanical Systems (MEMS)