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dc.contributor.convenorIEEE Sensors Council
dc.contributor.authorJi, Lujun
dc.contributor.authorZhu, Yong
dc.contributor.authorMoheimani, SO Reza
dc.contributor.authorYuce, Mehmet Rasit
dc.contributor.editorGary K. Fedder
dc.date.accessioned2011-03-01
dc.date.accessioned2012-08-26T23:10:50Z
dc.date.accessioned2017-03-01T22:47:48Z
dc.date.available2017-03-01T22:47:48Z
dc.date.issued2010
dc.date.modified2012-08-26T23:10:50Z
dc.identifier.isbn9781424481682
dc.identifier.issn1930-0395
dc.identifier.doi10.1109/ICSENS.2010.5690373
dc.identifier.urihttp://hdl.handle.net/10072/46527
dc.description.abstractThis paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from -6.27 um to +6.64 um at an actuation voltage of 100 V.
dc.description.peerreviewedNo
dc.description.publicationstatusYes
dc.format.extent1521091 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.publisherunknown
dc.publisher.placeunknown
dc.publisher.urihttps://ieeexplore.ieee.org/document/5690373
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofconferencename2010 IEEE Sensors Conference
dc.relation.ispartofconferencetitle2010 IEEE SENSORS
dc.relation.ispartofdatefrom2010-11-01
dc.relation.ispartofdateto2010-11-04
dc.relation.ispartoflocationKona, HI
dc.relation.ispartofpagefrom1464
dc.relation.ispartofpageto1467
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode401705
dc.titleA Micromachined 2DOF Nanopositioner with Integrated Capacitive Displacement Sensor
dc.typeConference output
dc.type.descriptionE2 - Conferences (Non Refereed)
dc.type.codee2x
gro.facultyFaculty of Science, Environment, Engineering and Technology
gro.rights.copyright© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.date.issued2010
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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