Development of Pollution Gas Sensors for the Energy Saving in a Clean Room

Author

Dao, Dzung Viet

Yamagishi, Yutaka

Year published

2011

Metadata

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Conference Title

Technical Digest of International Workshop on Green Devices and Micro Systems (GDMS 2011)

Publisher URI

http://unit.aist.go.jp/umemsme/files/GDMS2011.htm

Subject

Interdisciplinary Engineering not elsewhere classified

Publication URI

http://hdl.handle.net/10072/46569

Collection

Conference outputs