Environment Friendly MEMS Process
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This work presents our recent research and development of environment-friendly MEMS fabrication technology based on an eco-friendly silicon deep reactive ion etching (D-RIE), and polymer-MEMS utilizing hot embossing process. In order to show the capability of this 'Green' fabrication technology, several typical MEMS devices have been fabricated successfully.
Technical Digest of International Workshop on Green Devices and Micro Systems (GDMS 2011)