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  • Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect

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    Author(s)
    Mohd-Yasin, F
    Nagel, DJ
    Ong, DS
    Korman, CE
    Chuah, HT
    Griffith University Author(s)
    Mohd-Yasin, Faisal
    Year published
    2007
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    Abstract
    In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data show that the noise power increases at high temperature, but not as significant as predicted by the theory.
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    Conference Title
    MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS
    DOI
    https://doi.org/10.1109/IMNC.2007.4456261
    Copyright Statement
    © 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
    Subject
    Electrical and Electronic Engineering not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/46685
    Collection
    • Conference outputs

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