Low frequency noise measurement of three-axis surface micro- machined silicon capacitive accelerometer
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The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.
International Semiconductor Device Research Symposium, 2007. ISDRS '07
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Electrical and Electronic Engineering not elsewhere classified