Low frequency noise measurement of three-axis surface micro- machined silicon capacitive accelerometer

Mohd-Yasin, F.; Nagel, D.; Korman, C.; Ong, D.; Chuah, H.

doi:10.1109/ISDRS.2007.4422474

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Author

Ong, D.

Year published

2007

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Abstract

The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.The authors performed the low frequency noise measurement (LFNM) technique to study noise characteristics of commercial accelerometers with single and dual axis. In this work, we studied the noise characteristics of a three-axis accelerometer using an improved and sensitive test setup to avoid cross-axis distortion.
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Conference Title

International Semiconductor Device Research Symposium, 2007. ISDRS '07

DOI

https://doi.org/10.1109/ISDRS.2007.4422474

Copyright Statement

© 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Subject

Electrical and Electronic Engineering not elsewhere classified

Publication URI

http://hdl.handle.net/10072/46711

Collection

Conference outputs