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dc.contributor.authorPham, Phuc Hongen_US
dc.contributor.authorDao, Dzung Vieten_US
dc.contributor.authorDang, Lam Baoen_US
dc.contributor.authorSugiyama, Susumuen_US
dc.date.accessioned2017-04-24T13:48:27Z
dc.date.available2017-04-24T13:48:27Z
dc.date.issued2012en_US
dc.date.modified2012-09-20T22:43:25Z
dc.identifier.issn09601317en_US
dc.identifier.doi10.1088/0960-1317/22/1/015008en_US
dc.identifier.urihttp://hdl.handle.net/10072/46936
dc.description.abstractWe report a design and fabrication of a new micro rotational motor (MRM) using silicon micromachining technology with the overall diameter of 2.4 mm. This motor utilizes four silicon electrostatic comb-drive actuators to drive the outer ring (or rotor) through ratchet teeth. The novel design of the anti-reverse structure helps us to overcome the gap problem after deep reactive ion etching of silicon. The MRM was fabricated by using silicon on insulator wafer with the thickness of the device layer being 30 孠and one mask only. The motor was successfully tested for performance. It was driven by periodic voltage with different frequencies ranging from 1 to 50 Hz. The angular velocity of the outer ratchet ring was proportional to the frequency. Moreover, when the driving frequency is lower than 30 Hz, the experiment results perfectly match the theoretical calculation.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_US
dc.languageEnglishen_US
dc.publisherInstitute of Physics Publishing Ltd.en_US
dc.publisher.placeUnited Kingdomen_US
dc.relation.ispartofstudentpublicationNen_US
dc.relation.ispartofpagefrom015008-1en_US
dc.relation.ispartofpageto015008-7en_US
dc.relation.ispartofissue1en_US
dc.relation.ispartofjournalJournal of Micromechanics and Microengineeringen_US
dc.relation.ispartofvolume22en_US
dc.rights.retentionNen_US
dc.subject.fieldofresearchInterdisciplinary Engineering not elsewhere classifieden_US
dc.subject.fieldofresearchcode091599en_US
dc.titleSingle mask, simple structure micro rotational motor driven by electrostatic comb-drive actuatorsen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.date.issued2012
gro.hasfulltextNo Full Text


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