Show simple item record

dc.contributor.authorZhu, Yong
dc.contributor.authorMoheimani, SO Reza
dc.contributor.authorYuce, Mehmet Rasit
dc.date.accessioned2018-01-23T01:01:23Z
dc.date.available2018-01-23T01:01:23Z
dc.date.issued2012
dc.date.modified2013-06-16T23:35:01Z
dc.identifier.issn1530-437X
dc.identifier.doi10.1109/JSEN.2012.2194141
dc.identifier.urihttp://hdl.handle.net/10072/48434
dc.description.abstractA bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process. To achieve small stiffness without buckling, which tends to occur in V-shaped actuators, a new Z-shaped electrothermal actuator is designed. With the actuation current from -13 mA to +13 mA, the electrothermal actuator can achieve a bidirectional motion in a dynamic range from -11.6 孊to +12.8 孮 Experimentally obtained frequency response of the actuator indicates that it has a bandwidth of 49 Hz.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoen_US
dc.publisherIEEE
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom2508
dc.relation.ispartofpageto2509
dc.relation.ispartofissue7
dc.relation.ispartofjournalIEEE Sensors Journal
dc.relation.ispartofvolume12
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchOptical Physics
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchMechanical Engineering
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0205
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode0913
dc.titleBidirectional Electrothermal Actuator with Z-shaped Beams
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionPost-print
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.rights.copyright© 2012 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.date.issued2012
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


Files in this item

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record