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  • Analysis of Nonlinear Phenomena in a Thermal Micro-Actuator with a Built-in Thermal Position Sensor

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    Accepted Manuscript (AM)
    Author(s)
    Bazaei, Ali
    Zhu, Yong
    Moheimani, Reza
    Yuce, Mehmet Rasit
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2012
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    Abstract
    An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature ...
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    An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.
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    Journal Title
    IEEE Sensors Journal
    Volume
    12
    Issue
    6
    DOI
    https://doi.org/10.1109/JSEN.2011.2178236
    Copyright Statement
    © 2012 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subject
    Atomic, molecular and optical physics
    Mechanical engineering
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/48459
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    • Journal articles

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