Analysis of Nonlinear Phenomena in a Thermal Micro-Actuator with a Built-in Thermal Position Sensor
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An analysis of nonlinear effects associated with a chevron thermal micro-actuator with a built in thermal position sensor under static conditions is presented in this paper. The nonlinearities present in both actuator and sensor are studied. The phenomena considered for the sensor include: thermal coupling from actuator to sensor and temperature dependence of electrical resistivity. Those considered for the actuator include: non-uniform spatial distribution of temperature in arms, temperature dependency of thermal expansion coefficient, deviation of arm shape from straight line due to physical constraints, and temperature dependence of electrical resistivity.
IEEE Sensors Journal
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Microelectromechanical Systems (MEMS)