A micro gearing system based on a ratchet mechanism and electrostatic actuation
Author(s)
Phuc, Hong Pham
Dzung, Viet Dao
Griffith University Author(s)
Year published
2013
Metadata
Show full item recordAbstract
This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in ...
View more >This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in deep reactive ion etching (deep-RIE) process of silicon. The MGS has been fabricated and tested successfully by using SOI (silicon-on-insulator) wafer and one mask only. The angular velocity of the gear ring is proportional to the driving frequency up to 40 Hz.
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View more >This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in deep reactive ion etching (deep-RIE) process of silicon. The MGS has been fabricated and tested successfully by using SOI (silicon-on-insulator) wafer and one mask only. The angular velocity of the gear ring is proportional to the driving frequency up to 40 Hz.
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Journal Title
Microsystem Technologies
Volume
19
Issue
2
Subject
Engineering practice and education not elsewhere classified
Communications engineering
Nanotechnology