• myGriffith
    • Staff portal
    • Contact Us⌄
      • Future student enquiries 1800 677 728
      • Current student enquiries 1800 154 055
      • International enquiries +61 7 3735 6425
      • General enquiries 07 3735 7111
      • Online enquiries
      • Staff phonebook
    View Item 
    •   Home
    • Griffith Research Online
    • Journal articles
    • View Item
    • Home
    • Griffith Research Online
    • Journal articles
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

  • All of Griffith Research Online
    • Communities & Collections
    • Authors
    • By Issue Date
    • Titles
  • This Collection
    • Authors
    • By Issue Date
    • Titles
  • Statistics

  • Most Popular Items
  • Statistics by Country
  • Most Popular Authors
  • Support

  • Contact us
  • FAQs
  • Admin login

  • Login
  • A micro gearing system based on a ratchet mechanism and electrostatic actuation

    Author(s)
    Phuc, Hong Pham
    Dzung, Viet Dao
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2013
    Metadata
    Show full item record
    Abstract
    This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in ...
    View more >
    This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in deep reactive ion etching (deep-RIE) process of silicon. The MGS has been fabricated and tested successfully by using SOI (silicon-on-insulator) wafer and one mask only. The angular velocity of the gear ring is proportional to the driving frequency up to 40 Hz.
    View less >
    Journal Title
    Microsystem Technologies
    Volume
    19
    Issue
    2
    DOI
    https://doi.org/10.1007/s00542-012-1625-7
    Subject
    Engineering practice and education not elsewhere classified
    Communications engineering
    Nanotechnology
    Publication URI
    http://hdl.handle.net/10072/48673
    Collection
    • Journal articles

    Footer

    Disclaimer

    • Privacy policy
    • Copyright matters
    • CRICOS Provider - 00233E
    • TEQSA: PRV12076

    Tagline

    • Gold Coast
    • Logan
    • Brisbane - Queensland, Australia
    First Peoples of Australia
    • Aboriginal
    • Torres Strait Islander