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dc.contributor.authorSugiyama, S
dc.contributor.authorAmaya, S
dc.contributor.authorDao, DV
dc.date.accessioned2017-05-03T16:09:07Z
dc.date.available2017-05-03T16:09:07Z
dc.date.issued2012
dc.date.modified2013-06-18T00:02:44Z
dc.identifier.issn2043-6262
dc.identifier.doi10.1088/2043-6262/3/1/015009
dc.identifier.urihttp://hdl.handle.net/10072/48713
dc.description.abstractPolymethyl methacrylate (PMMA) has been proposed as a material for micro-electromechanical systems (MEMS) to initiate the research on environmentally friendly micro-nano machining technology using polymer materials. A polymer MEMS process has been developed using hot embossing and precision machining. MEMS structures less than 2孠were successfully embossed. The PMMA layer that remained after hot embossing was removed by a polishing process to release the movable parts. A PMMA electrostatic comb-drive microactuator was fabricated. Both finger width and gap between fingers were 5孬 and thickness was larger than 70孮 An operated displacement of 11孠at a drive voltage of 100V was obtained. It was 20 times larger than that of an identical silicon device. A torsional micro mirror device driving with vertical comb actuator was fabricated. The size of the mirror was 1ױmm2. The maximum tilt angle of 5.6 was obtained with driving voltage of 100V and frequency up to 100 Hz. A chevron-shaped PMMA thermal actuator with a thickness of about 50孠has been fabricated and tested successfully. The displacement was about 5 times larger than that of a Si counterpart at the same power consumption.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent1591264 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Physics Publishing Ltd.
dc.publisher.placeUnited Kingdom
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto7
dc.relation.ispartofissue1
dc.relation.ispartofjournalAdvances in Natural Sciences: Nanoscience and Nanotechnology
dc.relation.ispartofvolume3
dc.rights.retentionY
dc.subject.fieldofresearchManufacturing Processes and Technologies (excl. Textiles)
dc.subject.fieldofresearchMicrotechnology
dc.subject.fieldofresearchNanotechnology
dc.subject.fieldofresearchcode091006
dc.subject.fieldofresearchcode091009
dc.subject.fieldofresearchcode1007
dc.titleDevelopment of polymer MEMS process technology as an approach to a sustainable production system
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dcterms.licensehttp://creativecommons.org/licenses/by/3.0/
gro.rights.copyright© The Author(s) 2012. This is an Open Access article distributed under the terms of the Creative Commons Attribution 3.0 License (http://creativecommons.org/licenses/by/3.0/), which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.
gro.date.issued2012
gro.hasfulltextFull Text
gro.griffith.authorDao, Dzung V.


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