Integration of CNTs Thin Film for Sensing and Actuating Micro Structures
Author(s)
Van, Dau Thanh
Tung, Bui Thanh
Dao, Dzung
Sugiyama, Susumu
Year published
2012
Metadata
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This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.
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Journal Title
Vietnam Journal of Mechanics
Volume
34
Issue
4
Publisher URI
Subject
Microtechnology