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  • Integration of CNTs Thin Film for Sensing and Actuating Micro Structures

    Author(s)
    Van, Dau Thanh
    Tung, Bui Thanh
    Dao, Dzung
    Sugiyama, Susumu
    Griffith University Author(s)
    Dao, Dzung V.
    Dau, Van
    Year published
    2012
    Metadata
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    Abstract
    This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.This paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.
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    Journal Title
    Vietnam Journal of Mechanics
    Volume
    34
    Issue
    4
    Publisher URI
    http://vjs.ac.vn/index.php/vjmech/article/view/2342
    Subject
    Microtechnology
    Publication URI
    http://hdl.handle.net/10072/49741
    Collection
    • Journal articles

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