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dc.contributor.authorVan, Dau Thanh
dc.contributor.authorTung, Bui Thanh
dc.contributor.authorDao, Dzung
dc.contributor.authorSugiyama, Susumu
dc.date.accessioned2017-05-03T16:09:07Z
dc.date.available2017-05-03T16:09:07Z
dc.date.issued2012
dc.date.modified2013-03-24T22:44:11Z
dc.identifier.issn08667136
dc.identifier.urihttp://hdl.handle.net/10072/49741
dc.description.abstractThis paper reports the top-down fabrication of CNTs thin film on MEMS structure to develop sensing and actuating micro structures. In particular, this paper review the integration of CNTs film in application of silicon micromirror based on angular vertical comb actuator, development of microstructures with piezoresistive effect and Seebeck effect.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherVietnam Academy of Science and Technology
dc.publisher.placeVietnam
dc.publisher.urihttp://vjs.ac.vn/index.php/vjmech/article/view/2342
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom299
dc.relation.ispartofpageto309
dc.relation.ispartofissue4
dc.relation.ispartofjournalVietnam Journal of Mechanics
dc.relation.ispartofvolume34
dc.rights.retentionY
dc.subject.fieldofresearchMicrotechnology
dc.subject.fieldofresearchcode091009
dc.titleIntegration of CNTs Thin Film for Sensing and Actuating Micro Structures
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2012
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.
gro.griffith.authorDau, Van


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