dc.contributor.author | Kudimi, Jagan Mohan Reddy | |
dc.contributor.author | Mohd-Yasin, Faisal | |
dc.contributor.author | Dimitrijev, Sima | |
dc.contributor.editor | Walczak, R | |
dc.contributor.editor | Dziuban, J | |
dc.date.accessioned | 2017-09-14T23:00:15Z | |
dc.date.available | 2017-09-14T23:00:15Z | |
dc.date.issued | 2012 | |
dc.date.modified | 2013-04-04T04:28:43Z | |
dc.identifier.issn | 1877-7058 | |
dc.identifier.doi | 10.1016/j.proeng.2012.09.359 | |
dc.identifier.uri | http://hdl.handle.net/10072/50263 | |
dc.description.abstract | This paper explores the feasibility of employing cubic silicon carbide on silicon wafer (3C-SiC-on-Si) as a vertical cantilever for the piezoelectric-based energy harvesting in the d31 mode intended for the extreme environments. 100nm thick 3C-SiC layer is plasma-etched out of the <100> silicon (Si) wafer and is employed as a bottom electrode, 1孠thick Aluminum nitride (AlN) as a piezoelectric thin film (active layer) and 50nm thick Molybdenum is sputtered on top of the cantilever structure as a top electrode. The length and width of the cantilever beam are 400孠and 30孬 respectively. The performances of the energy harvester using 3C-SiC and Si as bottom electrode and substrate are simulated and compared. The generated output voltage at 1KO load resistance is 7.85 times higher for the 3C-SiC based device. Additional tests at higher temperatures show 3C-SiC superior performances in terms of generated power and material strength. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Elsevier | |
dc.publisher.place | Netherlands | |
dc.relation.ispartofstudentpublication | Y | |
dc.relation.ispartofpagefrom | 1165 | |
dc.relation.ispartofpageto | 1172 | |
dc.relation.ispartofjournal | Procedia Engineering | |
dc.relation.ispartofvolume | 47 | |
dc.rights.retention | Y | |
dc.subject.fieldofresearch | Engineering | |
dc.subject.fieldofresearch | Microelectronics | |
dc.subject.fieldofresearch | Microelectromechanical systems (MEMS) | |
dc.subject.fieldofresearchcode | 40 | |
dc.subject.fieldofresearchcode | 400908 | |
dc.subject.fieldofresearchcode | 401705 | |
dc.title | SiC-based Piezoelectric Energy Harvester for Extreme Environment | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
dcterms.license | http://creativecommons.org/licenses/by-nc-nd/3.0/ | |
dc.description.version | Version of Record (VoR) | |
gro.faculty | Griffith Sciences, School of Natural Sciences | |
gro.rights.copyright | © 2012 The Authors. Published by Elsevier Ltd. Open access under the Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported (CC BY-NC-ND 3.0) License which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited. You may not alter, transform, or build upon this work. | |
gro.date.issued | 2012 | |
gro.hasfulltext | Full Text | |
gro.griffith.author | Dimitrijev, Sima | |
gro.griffith.author | Mohd-Yasin, Faisal | |