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dc.contributor.authorKudimi, Jagan Mohan Reddy
dc.contributor.authorMohd-Yasin, Faisal
dc.contributor.authorDimitrijev, Sima
dc.contributor.editorWalczak, R
dc.contributor.editorDziuban, J
dc.date.accessioned2017-09-14T23:00:15Z
dc.date.available2017-09-14T23:00:15Z
dc.date.issued2012
dc.date.modified2013-04-04T04:28:43Z
dc.identifier.issn1877-7058
dc.identifier.doi10.1016/j.proeng.2012.09.359
dc.identifier.urihttp://hdl.handle.net/10072/50263
dc.description.abstractThis paper explores the feasibility of employing cubic silicon carbide on silicon wafer (3C-SiC-on-Si) as a vertical cantilever for the piezoelectric-based energy harvesting in the d31 mode intended for the extreme environments. 100nm thick 3C-SiC layer is plasma-etched out of the <100> silicon (Si) wafer and is employed as a bottom electrode, 1孠thick Aluminum nitride (AlN) as a piezoelectric thin film (active layer) and 50nm thick Molybdenum is sputtered on top of the cantilever structure as a top electrode. The length and width of the cantilever beam are 400孠and 30孬 respectively. The performances of the energy harvester using 3C-SiC and Si as bottom electrode and substrate are simulated and compared. The generated output voltage at 1KO load resistance is 7.85 times higher for the 3C-SiC based device. Additional tests at higher temperatures show 3C-SiC superior performances in terms of generated power and material strength.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeNetherlands
dc.relation.ispartofstudentpublicationY
dc.relation.ispartofpagefrom1165
dc.relation.ispartofpageto1172
dc.relation.ispartofjournalProcedia Engineering
dc.relation.ispartofvolume47
dc.rights.retentionY
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleSiC-based Piezoelectric Energy Harvester for Extreme Environment
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dcterms.licensehttp://creativecommons.org/licenses/by-nc-nd/3.0/
dc.description.versionVersion of Record (VoR)
gro.facultyGriffith Sciences, School of Natural Sciences
gro.rights.copyright© 2012 The Authors. Published by Elsevier Ltd. Open access under the Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported (CC BY-NC-ND 3.0) License which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited. You may not alter, transform, or build upon this work.
gro.date.issued2012
gro.hasfulltextFull Text
gro.griffith.authorDimitrijev, Sima
gro.griffith.authorMohd-Yasin, Faisal


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