Electronic properties of SiON/HfO2 insulating stacks on 4H-SiC (0001)

Author(s)
Afanas'ev, VV
Campbell, SA
Cheong, KY
Ciobanu, F
Dimitrijev, S
Pensl, G
Stesmans, A
Zhong, L
Griffith University Author(s)
Year published
2004
Metadata
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Journal Title
Materials Science Forum
Volume
457-460
Subject
Physical chemistry
Materials engineering
Publication URI
Collection