Color chart for thin SiC films grown on Si substrates

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Author(s)
Wang, Li
Dimitrijev, Sima
Walker, Glenn
Han, Jisheng
Iacopi, Alan
Tanner, Philip
Hold, Leonie
Zhao, Yu
Iacopi, Francesca
Year published
2013
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In this paper, a color chart based on experimental data was defined for thin SiC films grown on Si substrates. For SiC films thinner than 500 nm, the surface color was observed using an optical microscope with the incident light normally illuminated on the SiC surface. An image of the surface was then taken by a camera attached to the optical microscope and the surface color was defined using RGB code. For SiC films thicker than 500 nm, the colors were defined by observing the films under daylight fluorescent lighting by naked eyes. It was found that the colors of the SiC films varied as the thickness increased.In this paper, a color chart based on experimental data was defined for thin SiC films grown on Si substrates. For SiC films thinner than 500 nm, the surface color was observed using an optical microscope with the incident light normally illuminated on the SiC surface. An image of the surface was then taken by a camera attached to the optical microscope and the surface color was defined using RGB code. For SiC films thicker than 500 nm, the colors were defined by observing the films under daylight fluorescent lighting by naked eyes. It was found that the colors of the SiC films varied as the thickness increased.
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Journal Title
Materials Science Forum
Volume
740-742
Copyright Statement
© 2013 Trans Tech Publications. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
Subject
Physical chemistry
Materials engineering
Functional materials