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  • Color chart for thin SiC films grown on Si substrates

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    86142_1.pdf (160.0Kb)
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    Accepted Manuscript (AM)
    Author(s)
    Wang, Li
    Dimitrijev, Sima
    Walker, Glenn
    Han, Jisheng
    Iacopi, Alan
    Tanner, Philip
    Hold, Leonie
    Zhao, Yu
    Iacopi, Francesca
    Griffith University Author(s)
    Dimitrijev, Sima
    Tanner, Philip G.
    Year published
    2013
    Metadata
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    Abstract
    In this paper, a color chart based on experimental data was defined for thin SiC films grown on Si substrates. For SiC films thinner than 500 nm, the surface color was observed using an optical microscope with the incident light normally illuminated on the SiC surface. An image of the surface was then taken by a camera attached to the optical microscope and the surface color was defined using RGB code. For SiC films thicker than 500 nm, the colors were defined by observing the films under daylight fluorescent lighting by naked eyes. It was found that the colors of the SiC films varied as the thickness increased.In this paper, a color chart based on experimental data was defined for thin SiC films grown on Si substrates. For SiC films thinner than 500 nm, the surface color was observed using an optical microscope with the incident light normally illuminated on the SiC surface. An image of the surface was then taken by a camera attached to the optical microscope and the surface color was defined using RGB code. For SiC films thicker than 500 nm, the colors were defined by observing the films under daylight fluorescent lighting by naked eyes. It was found that the colors of the SiC films varied as the thickness increased.
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    Journal Title
    Materials Science Forum
    Volume
    740-742
    DOI
    https://doi.org/10.4028/www.scientific.net/MSF.740-742.279
    Copyright Statement
    © 2013 Trans Tech Publications. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
    Subject
    Physical chemistry
    Materials engineering
    Functional materials
    Publication URI
    http://hdl.handle.net/10072/52659
    Collection
    • Journal articles

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