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  • Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever

    Author(s)
    Tang, G
    Liu, J-Q
    Yang, B
    Luo, J-B
    Liu, H-S
    Li, Y-G
    Yang, C-S
    Dao, V-D
    Tanaka, K
    Sugiyama, S
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2012
    Metadata
    Show full item record
    Abstract
    A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 ...
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    A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 mW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
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    Journal Title
    Electronics Letters
    Volume
    48
    Issue
    13
    DOI
    https://doi.org/10.1049/el.2012.1419
    Subject
    Functional materials
    Communications engineering
    Publication URI
    http://hdl.handle.net/10072/52896
    Collection
    • Journal articles

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