Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever
Author(s)
Tang, G
Liu, J-Q
Yang, B
Luo, J-B
Liu, H-S
Li, Y-G
Yang, C-S
Dao, V-D
Tanaka, K
Sugiyama, S
Griffith University Author(s)
Year published
2012
Metadata
Show full item recordAbstract
A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 ...
View more >A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 mW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
View less >
View more >A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 mW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
View less >
Journal Title
Electronics Letters
Volume
48
Issue
13
Subject
Functional materials
Communications engineering