Fabrication and Experimental Characterization of Nanochannels
Author(s)
Vinh-Nguyen, Phan
Nam-Trung, Nguyen
Yang, Chun
Joseph, Pierre
Gueacute, Anne-Marie
Griffith University Author(s)
Year published
2012
Metadata
Show full item recordAbstract
Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep ...
View more >Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nanochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories were observed.
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View more >Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nanochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories were observed.
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Journal Title
Journal of Heat Transfer
Volume
134
Issue
5
Copyright Statement
Self-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the authors for more information.
Subject
Chemical engineering
Microtechnology
Mechanical engineering
Microelectromechanical systems (MEMS)