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dc.contributor.authorVinh-Nguyen, Phan
dc.contributor.authorNam-Trung, Nguyen
dc.contributor.authorYang, Chun
dc.contributor.authorJoseph, Pierre
dc.contributor.authorGueacute, Anne-Marie
dc.contributor.editorTerrence W. Simon,
dc.date.accessioned2017-05-03T16:14:42Z
dc.date.available2017-05-03T16:14:42Z
dc.date.issued2012
dc.date.modified2013-09-12T00:23:33Z
dc.identifier.issn0022-1481
dc.identifier.doi10.1115/1.4005702
dc.identifier.urihttp://hdl.handle.net/10072/53121
dc.description.abstractNanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nanochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories were observed.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherASME International
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom051012-1
dc.relation.ispartofpageto051012-6
dc.relation.ispartofissue5
dc.relation.ispartofjournalJournal of Heat Transfer
dc.relation.ispartofvolume134
dc.rights.retentionY
dc.subject.fieldofresearchChemical engineering
dc.subject.fieldofresearchMicrotechnology
dc.subject.fieldofresearchMechanical engineering
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode4004
dc.subject.fieldofresearchcode401410
dc.subject.fieldofresearchcode4017
dc.subject.fieldofresearchcode401705
dc.titleFabrication and Experimental Characterization of Nanochannels
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.rights.copyrightSelf-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the authors for more information.
gro.date.issued2012
gro.hasfulltextNo Full Text
gro.griffith.authorNguyen, Nam-Trung


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