Fabrication and Characterization of Silicon Micro Mirror with CNT Hinge

Tung, BT; Dau, VT; Dao, DV; Yamada, T; Hata, K; Sugiyama, S

doi:10.1109/MEMSYS.2011.5734518

Author(s)

Tung, BT

Dau, VT

Dao, DV

Yamada, T

Hata, K

Sugiyama, S

Griffith University Author(s)

Dao, Dzung V.

Dau, Van

Year published

2011

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Abstract

This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz.This paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz.
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Conference Title

2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

Publisher URI

http://www.ieee-mems2011.org/

DOI

https://doi.org/10.1109/MEMSYS.2011.5734518

Subject

Microtechnology

Publication URI

http://hdl.handle.net/10072/53303

Collection

Conference outputs