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dc.contributor.convenorKarl Böhringer and Liwei Lin
dc.contributor.authorTung, BT
dc.contributor.authorDau, VT
dc.contributor.authorDao, DV
dc.contributor.authorYamada, T
dc.contributor.authorHata, K
dc.contributor.authorSugiyama, S
dc.contributor.editorKarl Böhringer
dc.date.accessioned2017-05-03T16:09:05Z
dc.date.available2017-05-03T16:09:05Z
dc.date.issued2011
dc.date.modified2013-09-24T22:23:37Z
dc.identifier.isbn9781424496327
dc.identifier.issn1084-6999
dc.identifier.doi10.1109/MEMSYS.2011.5734518
dc.identifier.urihttp://hdl.handle.net/10072/53303
dc.description.abstractThis paper reports the fabrication and characterization results of a silicon micro mirror fabricated by integrated of top-down fabrication of CNTs thin film and conventional micromachining. The silicon mirror is suspended by CNT hinge and actuated by using electrostatic force through angular vertical comb system. The performance of the mirror had been characterized. Thanks to the excellent mechanical properties of CNTs, the mirror could be driven by low voltage, i.e. less than 5 V, and response frequency up to 500 Hz.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.publisherIEEE
dc.publisher.placeUnited States
dc.publisher.urihttp://www.ieee-mems2011.org/
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofconferencename24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.relation.ispartofconferencetitle2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
dc.relation.ispartofdatefrom2011-01-23
dc.relation.ispartofdateto2011-01-27
dc.relation.ispartoflocationCancun, MEXICO
dc.relation.ispartofpagefrom688
dc.relation.ispartofpageto691
dc.rights.retentionN
dc.subject.fieldofresearchMicrotechnology
dc.subject.fieldofresearchcode401410
dc.titleFabrication and Characterization of Silicon Micro Mirror with CNT Hinge
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
gro.date.issued2011
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.
gro.griffith.authorDau, Van


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    Contains papers delivered by Griffith authors at national and international conferences.

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