dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Walker, Glenn | |
dc.contributor.author | Wang, Li | |
dc.contributor.author | Malesys, Laura | |
dc.contributor.author | Ma, Shujun | |
dc.contributor.author | Cunning, Benjamin V | |
dc.contributor.author | Iacopi, Alan | |
dc.date.accessioned | 2017-05-03T15:30:43Z | |
dc.date.available | 2017-05-03T15:30:43Z | |
dc.date.issued | 2013 | |
dc.date.modified | 2013-11-19T03:57:31Z | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.doi | 10.1063/1.4774087 | |
dc.identifier.uri | http://hdl.handle.net/10072/54323 | |
dc.description.abstract | Residual stresses in epitaxial 3C-SiC films on silicon, for chosen growth conditions, appear determined by their growth orientation. Stress evaluation locally with Raman spectroscopy, and across a 150mm wafer with curvature measurements, indicate that thin films can be grown on Si(100) with residual tensile stresses as low as 150MPa. However, films on Si(111) retain a considerably higher stress, around 900MPa, with only minor decrease versus film thickness. Stacking faults are indeed geometrically a less efficient relief mechanism for the biaxial strain of SiC films grown on Si(111) with <111> orientation. Residual stresses can be tuned by the epitaxial process temperatures. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | American Institute of Physics | |
dc.publisher.place | United States | |
dc.relation.ispartofstudentpublication | N | |
dc.relation.ispartofpagefrom | 011908-1 | |
dc.relation.ispartofpageto | 011908-4 | |
dc.relation.ispartofjournal | Applied Physics Letters | |
dc.relation.ispartofvolume | 102 | |
dc.rights.retention | N | |
dc.subject.fieldofresearch | Physical sciences | |
dc.subject.fieldofresearch | Engineering | |
dc.subject.fieldofresearchcode | 51 | |
dc.subject.fieldofresearchcode | 40 | |
dc.title | Orientation-dependent stress relaxation in hetero-epitaxial 3C-SiC films | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
gro.faculty | Griffith Sciences, Griffith School of Engineering | |
gro.date.issued | 2013 | |
gro.hasfulltext | No Full Text | |
gro.griffith.author | Cunning, Ben V. | |
gro.griffith.author | Walker, Glenn M. | |
gro.griffith.author | Iacopi, Alan V. | |
gro.griffith.author | Wang, Li | |
gro.griffith.author | Iacopi, Francesca | |