• myGriffith
    • Staff portal
    • Contact Us⌄
      • Future student enquiries 1800 677 728
      • Current student enquiries 1800 154 055
      • International enquiries +61 7 3735 6425
      • General enquiries 07 3735 7111
      • Online enquiries
      • Staff phonebook
    View Item 
    •   Home
    • Griffith Research Online
    • Journal articles
    • View Item
    • Home
    • Griffith Research Online
    • Journal articles
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

  • All of Griffith Research Online
    • Communities & Collections
    • Authors
    • By Issue Date
    • Titles
  • This Collection
    • Authors
    • By Issue Date
    • Titles
  • Statistics

  • Most Popular Items
  • Statistics by Country
  • Most Popular Authors
  • Support

  • Contact us
  • FAQs
  • Admin login

  • Login
  • A resonant method for determining the residual stress and elastic modulus of a thin film

    Author(s)
    Ma, S
    Wang, S
    Iacopi, F
    Huang, H
    Griffith University Author(s)
    Iacopi, Francesca
    Year published
    2013
    Metadata
    Show full item record
    Abstract
    By measuring the resonant frequencies of the first two symmetric vibration modes of a circular thin-film diaphragm and solving the Rayleigh-Ritz equation analytically, the residual stress and elastic modulus of the film were determined simultaneously. The results obtained employing this method are in excellent agreement with those obtained numerically in finite element modelling when tested using freestanding circular SiC diaphragms with residual tensile stress. The stress and modulus values are also in reasonably good agreement with those obtained from nanoindentation and wafer curvature measurements, respectively.By measuring the resonant frequencies of the first two symmetric vibration modes of a circular thin-film diaphragm and solving the Rayleigh-Ritz equation analytically, the residual stress and elastic modulus of the film were determined simultaneously. The results obtained employing this method are in excellent agreement with those obtained numerically in finite element modelling when tested using freestanding circular SiC diaphragms with residual tensile stress. The stress and modulus values are also in reasonably good agreement with those obtained from nanoindentation and wafer curvature measurements, respectively.
    View less >
    Journal Title
    Applied Physics Letters
    Volume
    103
    Issue
    3
    DOI
    https://doi.org/10.1063/1.4813843
    Subject
    Physical sciences
    Engineering
    Ceramics
    Numerical modelling and mechanical characterisation
    Publication URI
    http://hdl.handle.net/10072/54340
    Collection
    • Journal articles

    Footer

    Disclaimer

    • Privacy policy
    • Copyright matters
    • CRICOS Provider - 00233E
    • TEQSA: PRV12076

    Tagline

    • Gold Coast
    • Logan
    • Brisbane - Queensland, Australia
    First Peoples of Australia
    • Aboriginal
    • Torres Strait Islander