A resonant method for determining the residual stress and elastic modulus of a thin film
Author(s)
Ma, S
Wang, S
Iacopi, F
Huang, H
Griffith University Author(s)
Year published
2013
Metadata
Show full item recordAbstract
By measuring the resonant frequencies of the first two symmetric vibration modes of a circular thin-film diaphragm and solving the Rayleigh-Ritz equation analytically, the residual stress and elastic modulus of the film were determined simultaneously. The results obtained employing this method are in excellent agreement with those obtained numerically in finite element modelling when tested using freestanding circular SiC diaphragms with residual tensile stress. The stress and modulus values are also in reasonably good agreement with those obtained from nanoindentation and wafer curvature measurements, respectively.By measuring the resonant frequencies of the first two symmetric vibration modes of a circular thin-film diaphragm and solving the Rayleigh-Ritz equation analytically, the residual stress and elastic modulus of the film were determined simultaneously. The results obtained employing this method are in excellent agreement with those obtained numerically in finite element modelling when tested using freestanding circular SiC diaphragms with residual tensile stress. The stress and modulus values are also in reasonably good agreement with those obtained from nanoindentation and wafer curvature measurements, respectively.
View less >
View less >
Journal Title
Applied Physics Letters
Volume
103
Issue
3
Subject
Physical sciences
Engineering
Ceramics
Numerical modelling and mechanical characterisation