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dc.contributor.authorMarsi, N
dc.contributor.authorMajlis, BY
dc.contributor.authorMohd-Yasin, F
dc.contributor.authorHamzah, AA
dc.contributor.editorUmar, AA
dc.contributor.editorSalleh, MM
dc.contributor.editorYahaya, M
dc.date.accessioned2017-05-03T15:53:54Z
dc.date.available2017-05-03T15:53:54Z
dc.date.issued2013
dc.date.modified2014-01-09T23:19:32Z
dc.identifier.issn1742-6588
dc.identifier.doi10.1088/1742-6596/431/1/012022
dc.identifier.urihttp://hdl.handle.net/10072/55487
dc.description.abstractThis project develops the pressure sensor for monitoring the extreme conditions inside the gas turbine engine. The capacitive-based instead of piezoresistive-based pressure sensor is employed to avoid temperature drift. The deflecting (top) plate and the fixed (bottom) plate generate the capacitance, which is proportional to the applied input pressure and temperature. Two thin film materials of four different sizes are employed for the top plate, namely cubic silicon carbide (3C-SiC) and silicon (Si). Their performances in term of the sensitivity and linearity of the capacitance versus pressure are simulated at the temperature of 27ì 500ì 700àand 1000î The results show that both materials display linear characteristics for temperature up to 500ì although SiC-based sensor shows higher sensitivity. However, when the temperatures are increased to 700àand 1000ì the Si- based pressure sensor starts to malfunction at 50 MPa. However, the SiC-based pressure sensor continues to demonstrate high sensitivity and linearity at such high temperature and pressure. This paper validates the need of employing silicon carbide instead of silicon for sensing of extreme environments.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Physics Publishing
dc.publisher.placeUnited Kingdom
dc.relation.ispartofstudentpublicationY
dc.relation.ispartofpagefrom012022-1
dc.relation.ispartofpageto012022-9
dc.relation.ispartofjournalJournal of Physics: Conference Series
dc.relation.ispartofvolume431
dc.rights.retentionY
dc.subject.fieldofresearchCondensed matter physics
dc.subject.fieldofresearchOther physical sciences
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode5104
dc.subject.fieldofresearchcode5199
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleThe Capacitance and Temperature Effects of the SiC- and Si-Based MEMS Pressure Sensor
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2013
gro.hasfulltextNo Full Text
gro.griffith.authorMohd-Yasin, Faisal


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