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dc.contributor.authorShiraishi, N
dc.contributor.authorIkehara, T
dc.contributor.authorDao, DV
dc.contributor.authorSugiyama, S
dc.contributor.authorAndo, Y
dc.date.accessioned2017-05-03T16:09:08Z
dc.date.available2017-05-03T16:09:08Z
dc.date.issued2013
dc.date.modified2014-01-13T00:17:37Z
dc.identifier.issn0924-4247
dc.identifier.doi10.1016/j.sna.2013.01.011
dc.identifier.urihttp://hdl.handle.net/10072/55529
dc.description.abstractWe investigated the size and mode dependencies of the resonance frequencies and quality factors of PMMA (polymethyl methacrylate) and PC (polycarbonate) cantilevers under atmospheric pressure in order to obtain fundamental data for polymer-based VOC (volatile organic compound) sensors. PMMA cantilevers and PC cantilevers are fabricated by hot embossing, bonding, and polishing techniques. Variations in the vibration mode result in large variations in the resonance frequencies and quality factors of these cantilevers. The measured resonance frequencies correlated well with the theoretical undamped resonance frequency of a flexural-vibrating cantilever. The measured quality factors varied from 10 to more than 100, depending on the vibration mode. A higher mode tended to exhibit a higher quality factor.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeSwitzerland
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto7
dc.relation.ispartofjournalSensors and Actuators A: Physical
dc.rights.retentionY
dc.subject.fieldofresearchMicrotechnology
dc.subject.fieldofresearchMaterials engineering
dc.subject.fieldofresearchMechanical engineering
dc.subject.fieldofresearchcode401410
dc.subject.fieldofresearchcode4016
dc.subject.fieldofresearchcode4017
dc.titleFabrication and testing of polymer cantilevers for VOC sensors
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2013
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.


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