A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator
Author(s)
Van, Thanh Dau
Bui, Thanh Tung
Thien, Xuan Dinh
Dzung, Viet Dao
Yamada, Takeo
Hata, Kenji
Sugiyama, Susumu
Year published
2013
Metadata
Show full item recordAbstract
This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a ...
View more >This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a rotate angle of 1.5? and a response frequency of 500 Hz.
View less >
View more >This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a rotate angle of 1.5? and a response frequency of 500 Hz.
View less >
Journal Title
Journal of Micromechanics and Microengineering
Volume
23
Issue
7
Subject
Engineering
Microtechnology