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  • A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array

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    Accepted Manuscript (AM)
    Author(s)
    Pal, J
    Zhu, Y
    Lu, JW
    Dao, DV
    Griffith University Author(s)
    Lu, Junwei
    Zhu, Yong
    Pal, Jitendra
    Dao, Dzung V.
    Year published
    2013
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    Abstract
    In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve small stiffness without buckling, a novel bidirectional Z-shaped thermal actuator is used instead of V-shaped thermal actuator, which can generate large displacement and high contact force at low actuation voltage. With the actuation current from-0.6 A to 0.6 A, the electrothermal actuator can achieve a bidirectional motion in a dynamic range of-10.08 μm to 10.17 μm.RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state ...
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    In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve small stiffness without buckling, a novel bidirectional Z-shaped thermal actuator is used instead of V-shaped thermal actuator, which can generate large displacement and high contact force at low actuation voltage. With the actuation current from-0.6 A to 0.6 A, the electrothermal actuator can achieve a bidirectional motion in a dynamic range of-10.08 μm to 10.17 μm.RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state insertion loss of-0.14 dB at 10 GHz and an OFF state isolation of-67 dB at 10 GHz are achieved on low resistivity silicon substrate.
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    Journal Title
    Advanced Materials Research
    Volume
    705
    DOI
    https://doi.org/10.4028/www.scientific.net/AMR.705.264
    Copyright Statement
    © 2013 Trans Tech Publications. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
    Subject
    Engineering
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/55698
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    • Journal articles

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