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dc.contributor.authorIacopi, Francesca
dc.contributor.authorE. Brock, Ryan
dc.contributor.authorIacopi, Alan
dc.contributor.authorHold, Leonie
dc.contributor.authorH.Dauskardt, Reinhold
dc.date.accessioned2018-08-02T22:00:47Z
dc.date.available2018-08-02T22:00:47Z
dc.date.issued2013
dc.date.modified2014-01-22T23:27:21Z
dc.identifier.issn13596454
dc.identifier.doi10.1016/j.actamat.2013.07.034
dc.identifier.urihttp://hdl.handle.net/10072/55984
dc.description.abstractThrough a novel methodology for evaluating layer-by-layer residual stresses in epitaxial silicon carbide films with resolution down to 10 nm, we indicate the existence of a highly compressed interfacial nanolayer between the films and their silicon substrates. This layer is consistently present underneath all types of silicon carbide films examined herein, regardless of the extent of residual tensile stress measured in the full thickness of the films, which varies from 300 up to 1300 MPa. We link this nanolayer to the carbonization step of the film growth process and we discuss in detail the implications in terms of fracture behaviour by bulge testing of micromachined membranes.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeUnited Kingdom
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom6533
dc.relation.ispartofpageto6540
dc.relation.ispartofissue17
dc.relation.ispartofjournalActa Materialia
dc.relation.ispartofvolume61
dc.rights.retentionY
dc.subject.fieldofresearchCompound Semiconductors
dc.subject.fieldofresearchCondensed Matter Physics
dc.subject.fieldofresearchMaterials Engineering
dc.subject.fieldofresearchMechanical Engineering
dc.subject.fieldofresearchcode091203
dc.subject.fieldofresearchcode0204
dc.subject.fieldofresearchcode0912
dc.subject.fieldofresearchcode0913
dc.titleEvidence of a highly compressed nanolayer at the epitaxial silicon carbide interface with silicon
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.facultyGriffith Sciences, School of Engineering and Built Environment
gro.date.issued2013
gro.hasfulltextNo Full Text
gro.griffith.authorIacopi, Alan V.
gro.griffith.authorHold, Leonie K.
gro.griffith.authorIacopi, Francesca


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    Contains articles published by Griffith authors in scholarly journals.

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