Ashing of photoresists using dielectric barrier discharge cryoplasmas

Author(s)

Stauss, Sven

Mori, Shusaku

Muneoka, Hitoshi

Terashima, Kazuo

Iacopi, Francesca

Griffith University Author(s)

Iacopi, Francesca

Year published

2013

Metadata

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Journal Title

Journal of Vacuum Science and Technology B

Volume

31

Issue

6

DOI

https://doi.org/10.1116/1.4825202

Subject

Condensed Matter Physics not elsewhere classified

Publication URI

http://hdl.handle.net/10072/56180

Collection

Journal articles