• myGriffith
    • Staff portal
    • Contact Us⌄
      • Future student enquiries 1800 677 728
      • Current student enquiries 1800 154 055
      • International enquiries +61 7 3735 6425
      • General enquiries 07 3735 7111
      • Online enquiries
      • Staff phonebook
    View Item 
    •   Home
    • Griffith Research Online
    • Journal articles
    • View Item
    • Home
    • Griffith Research Online
    • Journal articles
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Browse

  • All of Griffith Research Online
    • Communities & Collections
    • Authors
    • By Issue Date
    • Titles
  • This Collection
    • Authors
    • By Issue Date
    • Titles
  • Statistics

  • Most Popular Items
  • Statistics by Country
  • Most Popular Authors
  • Support

  • Contact us
  • FAQs
  • Admin login

  • Login
  • Ashing of photoresists using dielectric barrier discharge cryoplasmas

    Author(s)
    Stauss, Sven
    Mori, Shusaku
    Muneoka, Hitoshi
    Terashima, Kazuo
    Iacopi, Francesca
    Griffith University Author(s)
    Iacopi, Francesca
    Year published
    2013
    Metadata
    Show full item record
    Journal Title
    Journal of Vacuum Science and Technology B
    Volume
    31
    Issue
    6
    DOI
    https://doi.org/10.1116/1.4825202
    Subject
    Condensed Matter Physics not elsewhere classified
    Atmospheric Sciences
    Aerospace Engineering
    Materials Engineering
    Publication URI
    http://hdl.handle.net/10072/56180
    Collection
    • Journal articles

    Footer

    Disclaimer

    • Privacy policy
    • Copyright matters
    • CRICOS Provider - 00233E
    • TEQSA: PRV12076

    Tagline

    • Gold Coast
    • Logan
    • Brisbane - Queensland, Australia
    First Peoples of Australia
    • Aboriginal
    • Torres Strait Islander