Ashing of photoresists using dielectric barrier discharge cryoplasmas

Author(s)
Stauss, Sven
Mori, Shusaku
Muneoka, Hitoshi
Terashima, Kazuo
Iacopi, Francesca
Griffith University Author(s)
Year published
2013
Metadata
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Journal Title
Journal of Vacuum Science and Technology B
Volume
31
Issue
6
DOI
Subject
Condensed Matter Physics not elsewhere classified
Atmospheric Sciences
Aerospace Engineering
Materials Engineering
Publication URI
Collection