Ashing of photoresists using dielectric barrier discharge cryoplasmas
Author(s)
Stauss, Sven
Mori, Shusaku
Muneoka, Hitoshi
Terashima, Kazuo
Iacopi, Francesca
Griffith University Author(s)
Year published
2013
Metadata
Show full item recordJournal Title
Journal of Vacuum Science and Technology B
Volume
31
Issue
6
Subject
Condensed Matter Physics not elsewhere classified
Atmospheric Sciences
Aerospace Engineering
Materials Engineering