dc.contributor.author | Myhra, Sverre | |
dc.contributor.editor | J E Greene | |
dc.date.accessioned | 2017-05-03T11:07:44Z | |
dc.date.available | 2017-05-03T11:07:44Z | |
dc.date.issued | 2004 | |
dc.date.modified | 2007-03-18T21:32:59Z | |
dc.identifier.issn | 00406090 | |
dc.identifier.uri | http://hdl.handle.net/10072/5755 | |
dc.description.abstract | Oxide on Si wafers can be manipulated by a scanning probe microscope (SPM) operated in the electrical conductivity mode (ECM), by several distinctly different mechanisms (i.e. anodic oxidation, dielectric break-down, and lateral transport of silicaceous species). The mechanisms can, in principle, support the full sequence of write-read-erase-rewrite operations, and thus a next-generation data storage technology. Bit size ranges from 10 to 50 nm; read-write speeds are currently limited by single probe AFM operation. Electrically conducting diamond-like (DLC) films can be synthesised by an ion-beam assisted CVD route. Such films can be nano-machined with a probe by an ECM method. Present evidence suggests that local heating causes oxidation and prompt conversion to CO2. The process may be useful for fabricating stamps for nano-scale templating. Local deposition of thermal energy may also cause formation of a metastable low-density carbon phase. The phase is stable in vacuum, but will 'collapse' when oxygen is available, at a slow kinetic rate. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Elsevier | |
dc.publisher.place | Switzerland | |
dc.publisher.uri | http://www.elsevier.com/wps/find/journaldescription.cws_home/504106/description#description | |
dc.relation.ispartofpagefrom | 90 | |
dc.relation.ispartofpageto | 94 | |
dc.relation.ispartofjournal | Thin Solid Films | |
dc.relation.ispartofvolume | 459 | |
dc.subject.fieldofresearch | History and Archaeology | |
dc.subject.fieldofresearch | Physical Sciences | |
dc.subject.fieldofresearch | Engineering | |
dc.subject.fieldofresearch | Technology | |
dc.subject.fieldofresearchcode | 21 | |
dc.subject.fieldofresearchcode | 02 | |
dc.subject.fieldofresearchcode | 09 | |
dc.subject.fieldofresearchcode | 10 | |
dc.title | Manipulation of Si oxide and electrically conducting carbon films by scanning probe microscopy (SPM): nano-lithography and nano-machining | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
gro.rights.copyright | © 2004 Elsevier : Reproduced in accordance with the copyright policy of the publisher : This journal is available online | |
gro.date.issued | 2004 | |
gro.hasfulltext | No Full Text | |
gro.griffith.author | Myhra, Sverre | |