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  • Lithographic pattern formation via metastable state rare gas atomic beams

    Author(s)
    Baker, M
    Palmer, AJ
    MacGillivray, WR
    Sang, RT
    Griffith University Author(s)
    MacGillivray, William R.
    Sang, Robert T.
    Year published
    2004
    Metadata
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    Abstract
    Atomic beams of argon and neon in excited electronic metastable states have been used to pattern bare and dodecanethiol (DDT) resist coated Au/Si substrates. Positive and negative contrast patterning has been observed for DDT-Au/Si, and negative patterning has been observed for bare Au/Si. Our results provide evidence for the formation of these negative patterns resulting from significant background pump oil contamination, and at significantly lower metastable dosages than previously observed. X-ray photoelectron spectroscopy (XPS) results indicate the growth of a carbonaceous layer as the origin of the negative resists in ...
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    Atomic beams of argon and neon in excited electronic metastable states have been used to pattern bare and dodecanethiol (DDT) resist coated Au/Si substrates. Positive and negative contrast patterning has been observed for DDT-Au/Si, and negative patterning has been observed for bare Au/Si. Our results provide evidence for the formation of these negative patterns resulting from significant background pump oil contamination, and at significantly lower metastable dosages than previously observed. X-ray photoelectron spectroscopy (XPS) results indicate the growth of a carbonaceous layer as the origin of the negative resists in DDT-Au/Si and bare Au/Si substrates. For DDT-Au/Si, results indicate that the transition from positive to negative resist formation relies both on the metastable dosages and level of background pump oil contamination.
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    Journal Title
    Nanotechnology
    Volume
    15
    Publisher URI
    https://iopscience.iop.org/journal/0957-4484
    DOI
    https://doi.org/10.1088/0957-4484/15/9/041
    Publication URI
    http://hdl.handle.net/10072/5774
    Collection
    • Journal articles

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