dc.contributor.author | Baker, M | |
dc.contributor.author | Palmer, AJ | |
dc.contributor.author | MacGillivray, WR | |
dc.contributor.author | Sang, RT | |
dc.date.accessioned | 2017-05-03T11:34:57Z | |
dc.date.available | 2017-05-03T11:34:57Z | |
dc.date.issued | 2004 | |
dc.date.modified | 2009-09-14T07:14:03Z | |
dc.identifier.issn | 0957-4484 | |
dc.identifier.doi | 10.1088/0957-4484/15/9/041 | |
dc.identifier.uri | http://hdl.handle.net/10072/5774 | |
dc.description.abstract | Atomic beams of argon and neon in excited electronic metastable states have been used to pattern bare and dodecanethiol (DDT) resist coated Au/Si substrates. Positive and negative contrast patterning has been observed for DDT-Au/Si, and negative patterning has been observed for bare Au/Si. Our results provide evidence for the formation of these negative patterns resulting from significant background pump oil contamination, and at significantly lower metastable dosages than previously observed. X-ray photoelectron spectroscopy (XPS) results indicate the growth of a carbonaceous layer as the origin of the negative resists in DDT-Au/Si and bare Au/Si substrates. For DDT-Au/Si, results indicate that the transition from positive to negative resist formation relies both on the metastable dosages and level of background pump oil contamination. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Institute of Physics Publishing | |
dc.publisher.place | London | |
dc.publisher.uri | https://iopscience.iop.org/journal/0957-4484 | |
dc.relation.ispartofpagefrom | 1356 | |
dc.relation.ispartofpageto | 1362 | |
dc.relation.ispartofjournal | Nanotechnology | |
dc.relation.ispartofvolume | 15 | |
dc.subject.fieldofresearchcode | 240301 | |
dc.title | Lithographic pattern formation via metastable state rare gas atomic beams | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
gro.date.issued | 2004 | |
gro.hasfulltext | No Full Text | |
gro.griffith.author | MacGillivray, William R. | |
gro.griffith.author | Sang, Robert T. | |