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  • Micromachined NH3 Gas Sensor with ppb-level Sensitivity Based on WO3 Nanoparticles Thinfilm

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    Author(s)
    Dao, Dzung Viet
    Shibuya, Kyoji
    Bui, Tung Thanh
    Sugiyama, Susumu
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2011
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    Abstract
    We present a micromachined gas sensor which can detect dilute NH3 gas at ppb (parts per billion) concentration based on chemoresistive effect of semiconducting tungsten trioxide (WO3). The sensor structure consists of a poly-Si diaphragm-heater suspended on four tiny beams, which are connected to a frame with overall chip size of 1ױװ.3 mm3. Thanks to the diaphragm-beam structure, the power loss due to thermal conduction effect decreases and uniformed temperature on whole diaphragm is obtained. The sensor has been fabricated and tested. Thermal efficiency of the heater was measured to be 10 oC/mW. The optimal working temperature ...
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    We present a micromachined gas sensor which can detect dilute NH3 gas at ppb (parts per billion) concentration based on chemoresistive effect of semiconducting tungsten trioxide (WO3). The sensor structure consists of a poly-Si diaphragm-heater suspended on four tiny beams, which are connected to a frame with overall chip size of 1ױװ.3 mm3. Thanks to the diaphragm-beam structure, the power loss due to thermal conduction effect decreases and uniformed temperature on whole diaphragm is obtained. The sensor has been fabricated and tested. Thermal efficiency of the heater was measured to be 10 oC/mW. The optimal working temperature was found to be around 300 oC, and the sensor could detect NH3 gas at ppb concentration in a background of wet air. The nano-gap effect of the interdigitated electrodes in improvement of the sensitivity was also confirmed. Our estimation based on the measurement results and system noise showed a limit-of-detection of NH3 gas could be down to 2.5 ppb concentration.
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    Conference Title
    EUROSENSORS XXV
    Volume
    25
    Publisher URI
    http://www.eurosensors2011.org/
    DOI
    https://doi.org/10.1016/j.proeng.2011.12.283
    Copyright Statement
    © The Author(s) 2011. This is an Open Access article distributed under the terms of the Creative Commons Attribution-NonCommercial-NoDerivs 3.0 Unported (CC BY-NC-ND 3.0) License (http://creativecommons.org/licenses/by-nc-nd/3.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited. You may not alter, transform, or build upon this work.
    Subject
    Engineering
    Engineering practice and education not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/60889
    Collection
    • Conference outputs

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