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  • Fabrication and Characterization of a PMMA Capacitive Micro accelerometer based on Thermal Imprint Method

    Author(s)
    Amaya, Satoshi
    Dao, Dzung Viet
    Sugiyama, Susumu
    Griffith University Author(s)
    Dao, Dzung V.
    Year published
    2011
    Metadata
    Show full item record
    Conference Title
    Technical Digest of the 28th Sensor Symposium
    Publisher URI
    http://www2.iee.or.jp/~smas/Sensor_Sympo_E.html
    Subject
    Microtechnology
    Publication URI
    http://hdl.handle.net/10072/61117
    Collection
    • Conference outputs

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