Fabrication and Characterization of a PMMA Capacitive Micro accelerometer based on Thermal Imprint Method

Author(s)
Amaya, Satoshi
Dao, Dzung Viet
Sugiyama, Susumu
Griffith University Author(s)
Year published
2011
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Conference Title
Technical Digest of the 28th Sensor Symposium
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Subject
Microtechnology
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