Fabrication and Characterization of a PMMA Capacitive Micro accelerometer based on Thermal Imprint Method
Author(s)
Amaya, Satoshi
Dao, Dzung Viet
Sugiyama, Susumu
Griffith University Author(s)
Year published
2011
Metadata
Show full item recordConference Title
Technical Digest of the 28th Sensor Symposium
Publisher URI
Subject
Microtechnology