Characterization of ProTEX PSB Thin Film as Photosensitive Layer for MEMS Capacitive Pressure Sensor Diaphragm Based on SiC-on-Si Wafer
Author(s)
Marsi, Noraini
Majlis, Burhanuddin Yeop
Hamzah, Azrul Azlan
Mohd-Yasin, Faisal
Griffith University Author(s)
Year published
2013
Metadata
Show full item recordConference Title
International Conference on Advanced Material Engineering & Technology
Publisher URI
Subject
Microelectromechanical Systems (MEMS)
Microelectronics and Integrated Circuits