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dc.contributor.authorPhuc, Hong Pham
dc.contributor.authorToan, Khac Dinh
dc.contributor.authorLam, Bao Dang
dc.contributor.authorKhoa, Tuan Nguyen
dc.contributor.authorDzung, Viet Dao
dc.date.accessioned2017-05-03T16:09:09Z
dc.date.available2017-05-03T16:09:09Z
dc.date.issued2015
dc.date.modified2014-08-05T23:02:09Z
dc.identifier.issn0946-7076
dc.identifier.doi10.1007/s00542-014-2086-y
dc.identifier.urihttp://hdl.handle.net/10072/61870
dc.description.abstractThis paper reports a design and fabrication process of a micro cam system (MCS) with a flat-faced translating follower. The cam rim with cover diameter of 2.4 mm is driven by four electrostatic comb-drive actuators (ECA). Reciprocating motion of the ECAs is converted to unidirectional rotating movement of the outer cam rim through ratchet and anti-reverse mechanisms. The MCS was fabricated by using SOI (silicon on insulator) wafer with 30 孠thick device layer, and only one mask. Driven by periodic voltage with different frequencies, the performance of the MCS was successfully tested. In our experiment, when the system was run by the minimal driving voltage of 80 V, the obtained stroke of the follower was 160 孮 In addition, the system can run smoothly while applying the force of 31.3 厠on the follower. The MCS can be applied in micro valve structures, in micro assembling systems, etc.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSpringer
dc.publisher.placeGermany
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto10
dc.relation.ispartofjournalMicrosystem Technologies
dc.rights.retentionN
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchCommunications engineering
dc.subject.fieldofresearchNanotechnology
dc.subject.fieldofresearchElectronics, sensors and digital hardware
dc.subject.fieldofresearchcode401705
dc.subject.fieldofresearchcode4006
dc.subject.fieldofresearchcode4018
dc.subject.fieldofresearchcode4009
dc.titleMicro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.
gro.griffith.authorNguyen, Khoa T.


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