Microresonators with Q-factors over a million from highly stressed epitaxial silicon carbide on silicon
Author(s)
Ranjbar Kermany, Atieh
Brawley, George
Mishra, Neeraj
Sheridan, Eoin
P. Bowen, Warwick
Iacopi, Francesca
Year published
2014
Metadata
Show full item recordJournal Title
Applied Physics Letters
Volume
104
Subject
Compound Semiconductors
Physical Sciences
Engineering
Technology