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  • Proximity error correction method for continuous moving stage electron beam writing

    Author
    Kasture, Sachin
    V. V., Nikesh
    Mulay, Gajendra
    Gopal, Achanta Venu
    Year published
    2012
    Metadata
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    Abstract
    Fabrication of high density waveguide-like structures using electron-beam lithography is challenging due to concerns such as stitching errors and proximity issues, which lead to irregularities in the fabricated structure. Continuous moving stage writing method is used to avoid the stitching errors for the long waveguide-like structures, but conventional proximity error correction methods cannot be applied in such cases. The authors propose a simple theoretical method to proximity correct such structures and experimentally demonstrate it in the case of high density millimeter long waveguide-like or grating structures. This ...
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    Fabrication of high density waveguide-like structures using electron-beam lithography is challenging due to concerns such as stitching errors and proximity issues, which lead to irregularities in the fabricated structure. Continuous moving stage writing method is used to avoid the stitching errors for the long waveguide-like structures, but conventional proximity error correction methods cannot be applied in such cases. The authors propose a simple theoretical method to proximity correct such structures and experimentally demonstrate it in the case of high density millimeter long waveguide-like or grating structures. This method is ideal for high aspect ratio writing, which involves structures that have elements that are much longer than the separation between them. Also, in this method, every element can be assigned a single dose and thus does not need fracturing of individual elements. Experimental results agree well with the theoretically obtained corrections.
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    Journal Title
    Journal of Vacuum Science and Technology Part B: Microelectronics and Nanometer Structure
    Volume
    30
    Issue
    5
    DOI
    https://doi.org/10.1116/1.4746259
    Subject
    Engineering not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/62117
    Collection
    • Journal articles

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