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  • Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy

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    Author(s)
    Li, Shiguang
    Liu, Jing
    Nguyen, Nam-Trung
    Fang, Zhong Ping
    Yoon, Soon Fatt
    Griffith University Author(s)
    Nguyen, Nam-Trung
    Year published
    2009
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    Abstract
    Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen ...
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    Measuring buried, undercut microstructures is a challenging task in metrology. These structures are usually characterized by measuring their cross sections after physically cutting the samples. This method is destructive and the obtained information is incomplete. The distortion due to cutting also affects the measurement accuracy. In this paper, we first apply the laser fluorescent confocal microscopy and intensity differentiation algorithm to obtain the complete three-dimensional profile of the buried, undercut structures in microfluidic devices, which are made by the soft lithography technique and bonded by the oxygen plasma method. The impact of material wettability and the refractive index (n) mismatch among the liquid, samples, cover layer, and objective on the measurement accuracy are experimentally investigated.
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    Journal Title
    Applied Optics
    Volume
    48
    Issue
    33
    DOI
    https://doi.org/10.1364/AO.48.006432
    Copyright Statement
    © 2009 OSA. This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.48.006432. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
    Subject
    Interdisciplinary Engineering not elsewhere classified
    Fluid Physics
    Optical Physics
    Electrical and Electronic Engineering
    Mechanical Engineering
    Publication URI
    http://hdl.handle.net/10072/62221
    Collection
    • Journal articles

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