Fabrication of planar GaN-based micro-pixel light emitting diode arrays
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Author(s)
Massoubre, David
McKendry, J.J.D.
Guilhabert, Benoit
Gong, Zheng
Watson, Ian M.
Gu, Erdan
Dawson, Martin D.
Griffith University Author(s)
Year published
2009
Metadata
Show full item recordAbstract
We report a new processing approach which enables the fabrication of planar GaN-based micro-pixel LED arrays. This process is based on selective passivation of the p-doped GaN surface by a CHF(3) plasma treatment.We report a new processing approach which enables the fabrication of planar GaN-based micro-pixel LED arrays. This process is based on selective passivation of the p-doped GaN surface by a CHF(3) plasma treatment.
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Conference Title
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS
Copyright Statement
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Subject
Photonics, Optoelectronics and Optical Communications