The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature

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Author(s)
Marsi, N
Majlis, BY
Hamzah, AA
Mohd-Yasin, F
Griffith University Author(s)
Year published
2014
Metadata
Show full item recordJournal Title
Journal of Engineering
Volume
2014
Copyright Statement
© The Author(s) 2014. The attached file is posted here with permission of the copyright owners for your personal use only. No further distribution permitted.For information about this journal please refer to the journal's website. The online version of this work is licensed under a Creative Commons License, available at http://creativecommons.org/licenses/by-nc-sa/2.1/au/
Subject
Engineering
Microelectronics