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  • The Mechanical and Electrical Effects of MEMS Capacitive Pressure Sensor Based 3C-SiC for Extreme Temperature

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    Author(s)
    Marsi, N
    Majlis, BY
    Hamzah, AA
    Mohd-Yasin, F
    Griffith University Author(s)
    Mohd-Yasin, Faisal
    Year published
    2014
    Metadata
    Show full item record
    Journal Title
    Journal of Engineering
    Volume
    2014
    DOI
    https://doi.org/10.1155/2014/715167
    Copyright Statement
    © The Author(s) 2014. The attached file is posted here with permission of the copyright owners for your personal use only. No further distribution permitted.For information about this journal please refer to the journal's website. The online version of this work is licensed under a Creative Commons License, available at http://creativecommons.org/licenses/by-nc-sa/2.1/au/
    Subject
    Engineering
    Microelectronics
    Publication URI
    http://hdl.handle.net/10072/62512
    Collection
    • Journal articles

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